Hydrogenated amorphous silicon pixel detectors for minimum ionizing particles
نویسندگان
چکیده
منابع مشابه
A novel low noise hydrogenated amorphous silicon pixel detector
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 squar pixels with 380 lm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. Th deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using bet particles from Ni...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
سال: 1988
ISSN: 0168-9002
DOI: 10.1016/0168-9002(88)90807-8